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Equipment for thin film deposition

AB200 laser microprocessing system

AB200 laser microprocessing system. UV ns/ps (quasi-CW). Laser systems: Spectra-Physics Pulseo DPSS Nd:YVO4 1 Hz-400 kHz 20 W @ 100 kHz pulse-width < 20 ns. Six-DOF positioning system. TTL vision system . Fix lens head. Scanner head. XYZ linear stages rotation and tilt stages. Spectra-Physics Vanguard DPSS Nd:YVO4 80 MHz Power 2.5 W pulse-width <

InnoLas laser microprocessing system

System designed to perform laser microprocessing using fixed optics or a scanner, with the possibility of working at different wavelengths (IR, VIS, UV).

ML100 laser micromachining system

It has two lasers, the Spectra Physics HIPPO DPSS Nd:YVO4 355 nm 15 ns and the Excimer ATL Laser Lasertechnik SP300i: KrF excimer 248 nm 7 ns, as well as a TTL vision system with x, y and z axes and micrometric-precision rotation and tilt for 3D processing.