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Facilities MEMS Research Center

MEMS Research Center

Advanced material science and engineeringHealthSmart industry and space technologies
LOCATION
Istanbul Technical University (ITU)
ITU MEMS Research Center
Description
(MEMS and NEMS). The size of the laboratory is about 250 m2, including 150 m2 service area, and the clean room is class 1000. We are able to perform sub-micron pattern formation and wet/dry etching on Si wafer. The size of MEMS clean room is 100 m2 and its classification is class 1000. The ambient of the cleanroom is controlled so that R.H and temperature are 50% and 20°C, respectively. The clean-room has the wet/dry etch capability and PVD-based deposition system. There are also several tools for the characterization of microsystems. There are several simulation tools as well; the important ones are Comsol MEMS module and ANSYS programs. Besides, there is a cell laboratory for cell-based studies which is annexed to the MEMS Center. Cell Culture laboratory was founded in 2015 to perform biological applications using microfluidic systems. Cell lines used in mechanobiology and cell separation studies are cultivated in this laboratory in order to carry-out the experiments effectively. ...

Levent TRABZON
Director
Nano/Micro Electro-Mechanical Systems Laboratory
Istanbul Technical University (ITU)

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Type
A scientific or technological infrastructure
Activities
Research activities
Load
Between 50% to 80% used
More information
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