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Facilities Metalorganic vapour-phase epitaxy (MOVPE) reactor

Metalorganic vapour-phase epitaxy (MOVPE) reactor

Advanced material science and engineeringClimate energy and mobilityFood bioeconomy natural resources agriculture and environmentNatural SciencesSmart industry and space technologies
LOCATION
Technical University of Madrid (UPM)
III-V semiconductors
Description
The MOVPE reactor is the AIXTRON AIX/200-4 model. It measures 6 metres (length) x 1.4 metres (width) x 2.4 metres (height) and weighs approximately 3200 kg.


CARLOS ALGORA DEL VALLE
Responsable
Grupo: Semiconductores III-V; Centro/int: Instituto de Energía Solar
Technical University of Madrid (UPM)

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