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Facilities Metalorganic vapour-phase epitaxy (MOVPE) reactor

Metalorganic vapour-phase epitaxy (MOVPE) reactor

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LOCATION
Technical University of Madrid (UPM)
III-V semiconductors
Description
The MOVPE reactor is the AIXTRON AIX/200-4 model. It measures 6 metres (length) x 1.4 metres (width) x 2.4 metres (height) and weighs approximately 3200 kg.

Way(s) of collaboration

Sharing rules are available here: https://www.upm.es/recursosidi/infraestructura/reactor-epitaxial-en-fase-vapor-a-partir-de-precursores-metalorganicos-en-ingles-movpe/Please read this document to know the sharing rules


CARLOS ALGORA DEL VALLE
Responsable
Grupo: Semiconductores III-V; Centro/int: Instituto de Energía Solar
Technical University of Madrid (UPM)

Get in contact
Type
A scientific or technological infrastructure
Activities
Research, Teaching, and others (industrial...) activities
Load
Unknown
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I am from UPM, may I publish on the catalogue?
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